Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2006-06-20
2006-06-20
Trinh, Michael (Department: 2822)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S014000, C438S018000, C438S928000
Reexamination Certificate
active
07063992
ABSTRACT:
A method of processing a semiconductor wafer includes utilizing a heated gas to heat at least one part of a semiconductor wafer by convection whereupon at least one contaminant is desorbed therefrom. A stream of cooling gas is caused to pass over the one part of the semiconductor wafer in the absence of heated gas to cool the one part of the semiconductor wafer. A metrology tool is then caused to measure at least one part of the semiconductor wafer to determine at least one characteristic thereof.
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Adams Michael J.
Healy, Jr. James
Howland, Jr. William H.
Novacek Christy
Solid State Measurements, Inc.
The Webb Law Firm
Trinh Michael
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