Semiconductor substrate, SOI substrate and manufacturing...

Details Semiconductor substrate, SOI substrate and manufacturing... Semiconductor substrate, SOI substrate and manufacturing...

2005-01-11

2005-01-11

Lebentritt, Michael (Department: 2824)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Multiple layers

C438S763000, C438S765000, C438S769000

Reexamination Certificate

active

06841490

ABSTRACT:
A substrate for a semiconductor device includes a crystalline silicon substrate; an insulative silicon compound layer thereon and a crystalline insulation layer on the insulative silicon compound layer, wherein the insulative silicon compound layer contains not more than 10 at % of component element of a material constituting the crystalline insulation layer, the component element being provided in the insulative silicon compound layer by diffusion.

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