Material or article handling – Load support has linear vertical movement and additional... – Additional movement is rotational
Reexamination Certificate
2007-11-06
2007-11-06
Underwood, Donald (Department: 3652)
Material or article handling
Load support has linear vertical movement and additional...
Additional movement is rotational
C294S001200, C414S800000, C414S808000, C414S815000
Reexamination Certificate
active
11168225
ABSTRACT:
According to one aspect of the present invention, a passive substrate gripper, including first and second segments, is provided. The second segment may be connected to the first segment, and the first and second segments may jointly form a substrate support. The substrate support may be shaped to support a substrate in first position within the substrate support when the substrate support is in a first angular orientation. The substrate may be removable from substrate support in a first direction when in the first position. The substrate may move into a second position when the substrate support is moved into a second angular orientation. The substrate may not be removable in the first direction when in the second position within the substrate support. The passive substrate gripper may also include a support ledge extending from opposing inner surfaces of the first and second segments, on which the substrate is supported.
REFERENCES:
patent: 2006/0113806 (2006-06-01), Tsuji et al.
Endo Rick R.
Ko Alexander S.
Wadensweiler Ralph M.
Applied Materials Inc.
Underwood Donald
LandOfFree
Semiconductor substrate processing apparatus with a passive... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor substrate processing apparatus with a passive..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor substrate processing apparatus with a passive... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3876300