Semiconductor substrate processing apparatus with a passive...

Material or article handling – Load support has linear vertical movement and additional... – Additional movement is rotational

Reexamination Certificate

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Details

C294S001200, C414S800000, C414S808000, C414S815000

Reexamination Certificate

active

11168225

ABSTRACT:
According to one aspect of the present invention, a passive substrate gripper, including first and second segments, is provided. The second segment may be connected to the first segment, and the first and second segments may jointly form a substrate support. The substrate support may be shaped to support a substrate in first position within the substrate support when the substrate support is in a first angular orientation. The substrate may be removable from substrate support in a first direction when in the first position. The substrate may move into a second position when the substrate support is moved into a second angular orientation. The substrate may not be removable in the first direction when in the second position within the substrate support. The passive substrate gripper may also include a support ledge extending from opposing inner surfaces of the first and second segments, on which the substrate is supported.

REFERENCES:
patent: 2006/0113806 (2006-06-01), Tsuji et al.

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