Semiconductor processing system with robotic autoloader and load

Details Semiconductor processing system with robotic autoloader and load Semiconductor processing system with robotic autoloader and load

1992-10-19

1994-01-25

Werner, Frank E.

Handling: hand and hoist-line implements

Grapple

Slideable jaws

294106, 294902, 414416, 414217, 414753, 901 38, B66C 142

Patent

active

052809838

ABSTRACT:
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

REFERENCES:
patent: 3255893 (1966-06-01), Hainer et al.
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3901183 (1975-08-01), Wittkower
patent: 3902615 (1975-09-01), Levy et al.
patent: 4141458 (1979-02-01), Brooks et al.
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4319864 (1982-03-01), Kaufeldt
patent: 4345866 (1982-08-01), Greene
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4417845 (1983-11-01), Burton
patent: 4449884 (1984-05-01), Motoda
patent: 4457661 (1984-07-01), Flint et al.
patent: 4473455 (1984-09-01), Dean et al.
patent: 4547119 (1985-10-01), Chance et al.
patent: 4553069 (1985-11-01), Purser
patent: 4604026 (1986-08-01), Barrett
patent: 4636401 (1987-01-01), Yamazaki et al.
Solid State Technology, vol. 28 No. 1 Jan. 1985 p. 74.
Applied Materials; product brochure "AME 8100 Series".
Plasma Etch System dated Oct. 1983.

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