Semiconductor processing system with robotic autoloader and load

Details Semiconductor processing system with robotic autoloader and load Semiconductor processing system with robotic autoloader and load

1987-08-25

1990-03-27

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414786, 414225, 414730, 414416, 414331, 414732, 414917, 4147442, 414751, 414741, 118503, 118500, 118 50, 118729, 432239, 901 47, 294 90, 2941191, B65G 6500

Patent

active

049115979

ABSTRACT:
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

REFERENCES:
patent: 3255893 (1966-06-01), Hainer et al.
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3901183 (1975-08-01), Wittkower
patent: 3902615 (1975-09-01), Levy et al.
patent: 4141458 (1979-02-01), Brooks et al.
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4312618 (1982-01-01), Greene
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4457661 (1984-07-01), Flint et al.
patent: 4473455 (1984-09-01), Dean et al.
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4523985 (1985-06-01), Dimock
patent: 4553069 (1985-11-01), Purser
patent: 4579080 (1986-04-01), Martin et al.
patent: 4636401 (1987-01-01), Yamazaki et al.
"Semiconductor Production"--Autumn 1980--pp. 31-33.
"IBM Technical Disclosure Bulletin"--vol. 21, No. 8, Jan. 1979, pp. 3178 to 3180.
Solid State Technology, vol. 28, No. 1, Jan. 1985, p. 74, Port Washington, N.Y., "Wafer Handling Robot".
Applied Materials, Inc.'s product brochure, "AME 8100 Series Plasma Etch System", dated Oct. 1983.

Affiliated with

Also associated with

Rating

Semiconductor processing system with robotic autoloader and load does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor processing system with robotic autoloader and load, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor processing system with robotic autoloader and load will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1647235