Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2008-01-15
2008-01-15
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C438S048000, C324S762010, C324S754090, C977S879000, C977S878000, C977S875000, C369S043000, C369S126000, C422S051000, C422S051000
Reexamination Certificate
active
07319224
ABSTRACT:
Provided are a semiconductor probe with a resistive tip, and a method of fabricating the semiconductor probe. The method includes forming a stripe-shaped mask layer on a substrate doped with a first impurity, and forming first and second electrode regions by heavily doping portions of the substrate not covered by the mask layer with a second impurity opposite in polarity to the first impurity; annealing the substrate to decrease a gap between the first and second semiconductor electrode regions, and forming resistive regions lightly doped with the second impurity at portions contiguous with the first and second semiconductor electrode regions; forming a stripe-shaped first photoresist orthogonal to the mask layer, and etching the mask layer such that the mask layer has a square shape; forming a second photoresist on the substrate to cover a portion of the first photoresist and define a cantilever region; forming the cantilever region by etching portions not covered by the first and second photoresists; and removing the first and second photoresists, and forming a resistive tip having a semi-quadrangular pyramidal shape by etching portions of the substrate not covered by the mask layer.
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Park Hongsik et al.: “Scanning resistive probe microscopy: Imaging ferroelectric domains” Applied Physics Letters, AIP, American Institute of Physics, Melville, NY, US, vol. 84, No. 10, Mar. 8, 2004, pp. 1734-1736, XP012060728.
Baeck Kyoung-lock
Hong Seung-bum
Jung Ju-hwan
Ko Hyoung-soo
Park Chul-min
Berman Jack I.
Hashmi Zia R.
Samsung Electronics Co,. Ltd.
Sughrue Mion Pllc.
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