Semiconductor package for multiple high power transistors

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S723000, C257S724000

Reexamination Certificate

active

06617679

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates generally to a technique for connecting multiple semiconductor devices in a single configuration, and more particularly to a technique for mounting multiple high power metal oxide field effect transistors (MOSFETS) in a single configuration that eliminates internal oscillations while maximizing device performance such as gain, bandwidth, etc. while reducing package complexity.
2. Brief Description of the Prior Art
The desire for high power semiconductor devices has led manufacturers to combining multiple die in a single package in such a way that the package has the characteristics of a single semiconductor device. This precedent has long been established in devices designed to run at higher frequencies. While lower frequency applications have driven device manufactures to make larger single die to handle higher power densities, high frequency applications favor parallel combinations of smaller die to maximize device performance and better control power dissipation at the intended frequency of use. It has been found that these devices may be subject to internal oscillations. Such as when four transistor die are combined, two die or two pairs of die can oscillate 180 degrees out of phase, three die can oscillate 120 degrees out of phase, or four die can oscillate 90 degrees out of phase. As a result the external connections act as virtual grounds and nothing that is done external to the package can prevent the internal oscillations when the device is biased in its active region. This problem is known, though more often solved by placing resistors in the gate of combined MOSFET devices to prevent the oscillations, though at the expense of device performance. Most MOSFET packages which utilize multiple combined die benefit from a very low impedance source connection which is generally connected directly to the amplifier ground. This physical connection will be shown to enable greater stability, allowing some packages to eliminate the gate resistors altogether. As new topologies in use at higher frequencies begin to take advantage of higher voltage and higher speed devices, power semiconductor packages are required to be isolated from the local ground source. Existing semiconductor packages which combine multiple die and newer ones which utilize similar die-interconnect methods with their grounded-source predecessors would now suffer from instabilities, forcing a solution which compromises device performance to resolve. A similar problem is developing in lower frequency semiconductor devices. Although these devices are typically isolated to begin with, issues with increasing power cycling requirements have called for smaller multiple combined die to replace the existing larger single die, now creating internal oscillations that had not previously been noted. Although utilization of high frequency oscillation dampening methods, including gate resistors, may not notably affect device performance, it does increase the package complexity, and therefore cost.
One example of a prior art packaging design is shown in FIG.
1
. In
FIG. 1
there is shown field effect transistor (FET) die
2
,
4
,
6
, and
8
that are mounted in a single package generally shown as
10
. The package consists of a ceramic base
12
providing a supporting structure and metallizations
14
shown hashed which forms the interconnects. The package consists of one gate terminal
16
and four separate source terminals
18
,
20
,
22
, and
24
, which are connected in pairs. Terminal
18
is connected to terminal
20
and terminal
22
is connected to
24
by the metallizations on the ceramic base
12
. No internal connection is made between the terminals
18
and
22
. Also shown are four source resistors
26
,
28
,
30
, and
32
connected to the die by wire bonds such as
34
. As will be shown herein after, because there is no low inductance connection between the source of each die and the first point where the sources are connected together, internal oscillations can result with the FET pairs
2
-
4
and
6
-
8
taking part in the oscillation. The package of this design is especially vulnerable to internal oscillations if the source is not grounded, i.e. allowed to float as is frequently required. In a floating source design the inductance between the two groups of source terminals
18
-
20
and
22
-
24
can be high enough to cause the internal oscillations described herein.
Another example of a prior art packaging technique is shown in FIG.
2
. This example has two die
36
and
38
on a ceramic insulator
40
. The gate distribution network
42
runs along the center of the package and two source connections
44
and
46
are on the edges of the package. Although the source wire bonds such as
48
connect the two die, the high inductance of this connection necessitates the connection of the source terminals
44
and
46
to the conducting base
50
through conductive strips
52
along the side of the package. Designs like this, which has the gate along the middle of the configuration of devices, is fairly typical of prior art designs. This is also found in U.S. Pat. No. 6,020,636 issued to G. C. Adishian wherein the gates are arranged in the geometric center of the configuration and the sources connected along the outside. In this case gate resistors are utilized.
Since the external gate, drain and source connections act as virtual grounds when the configuration of devices oscillate internally, the oscillations can be analyzed by considering the equivalent circuit of a single device taking part in the oscillation. A linearized model is good enough to explain the onset of oscillations and the methods required to prevent such oscillations, which is the object of the present invention. A model of a single die (or a group of die acting in concert) with parasitic components and the transformations required to obtain a simple circuit from which to determine the loop gain is shown in FIG.
3
. In FIG.
3
(
a
) the linearized current gain (change in drain to source current over the change in gate to source voltage) of a single die is denoted by h. The gate, drain and source terminals are labeled g, d, and s respectively. C
1
, C
2
and C
3
represent the linearized incremental gate-drain, gate-source and drain-source capacitances, respectively. R
3
represents the gate resistance. The parasitic inductance, bond wires and interconnect, between the die and the point where the gates of the various die are first connected together is represented by L
3
and the parasitic inductance between the source and the point where the sources are first connected together is represented by L
2
. The drain inductance is ignored in this analysis, as it is usually small. By transforming the circuit as shown in FIG.
3
(
b
), the loop gain is simply the voltage at the gate (g). In FIG.
3
(
b
) AC=h indicates an independent sinusoidal current source with amplitude h. A typical set of parameters is shown in Table 1.
TABLE 1
Typical Parameters
Parameter
Value
Units
C1
50
pF
C2
1.45
nF
C3
100
pF
L2
6
nH
R3
1.5
&OHgr;
With typical parameters like these, the following critical observation is made. If the phase of the loop gain is plotted vs. frequency and L
3
is varied, there is a critical value of L
3
at which the phase change at resonance changes from a destabilizing to a stabilizing phase change.
Having a phase that is stabilizing for all values of gain is a big advantage as the gain can vary considerably depending on how the device is biased. The principle at stake is that the frequency at which the gate inductance resonates with the gate-drain capacitance must be low in relation to the frequency at which the drain-source capacitance resonates with the source inductance. This is demonstrated in
FIGS. 4-8
.
FIG. 4
illustrates the phase of the loop gain with a gate inductance L
3
equal to 8 nH.
FIG. 5
illustrates the phase of the loop gain with a gate inductance L
3
equal to 12 nH.
FIG. 6
illustrates the phase of the loop gain with a gate inducta

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