Semiconductor package

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – For plural devices

Reexamination Certificate

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C257S723000, C257S777000

Reexamination Certificate

active

06570249

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to semiconductor devices and fabrication methods of the same, and more particularly, to a semiconductor device incorporated with electronic components such as passive components, and a method for fabricating the semiconductor device.
BACKGROUND OF THE INVENTION
Generally, in order to desirably improve performances and functionality, semiconductor devices are often made in association with electronic components such as passive components. For example, U.S. Pat. Nos. 5,264,730, 5,311,405, 5,811,880, 5,825,628 and 6,316,828 disclose the incorporation of passive components on substrates for use in BGA (ball grid array) semiconductor packages, which passive components are purposed in enhancing overall electrical functions of the semiconductor packages.
Such a substrate with passive components being mounted thereon for use in a semiconductor device is illustrated in
FIG. 9
, wherein the passive components
40
such as resistors or capacitors are preferably disposed on a ground ring
13
and a power ring
12
of the substrate
10
at positions close to a chip
20
that is accommodated on the substrate
10
. In particular, the passive components
40
are most preferably positioned at four corners in proximity to the chip
20
, respectively.
However, as the passive components
40
occupied certain layout area on the substrate
10
, pitches P between adjacent bond fingers
11
that are located between two passive components
40
, are necessarily reduced from conventional dimensions of 0.150 mm to fine pitches such as 0.125 mm. This thereby significantly increases the fabrication costs.
Besides, the passive components
40
also adversely affect trace routability on the substrate
10
; routing area and space for conductive traces (not shown) formed on the substrate
10
are both restricted by the arrangement of the passive components
40
. On the contrary, in concern of complying with trace routability of the substrate
10
, the passive components
40
must be arranged in a manner as not to interfere with the conductive traces formed on the substrate
10
; this limits the number and positioning of the passive components
40
to be adopted in semiconductor devices.
Moreover, in case of the passive components
40
being disposed at peripheral positions instead of the corners nearby the chip
20
according to practical requirements, bonding wires
30
are formed to extend from the chip
20
and across the passive components
40
, for electrically connecting bond pads
21
of the chip
20
to the corresponding bond fingers
11
on the substrate
10
. However, as shown in
FIG. 10
, short circuit may easily occur as the bonding wires
30
come into contact with edges of the passive components
40
, which thereby degrades the wire bonding quality and product reliability. Although this short-circuiting problem can be solved by pre-encapsulating the passive components
40
with an insulating material before forming the bonding wires
30
, this pre-encapsulation process would undesirably increase complexity and costs in fabrication.
In response to the above-mentioned drawbacks, U.S. Pat. No. 5,670,824 discloses a type of substrate integrally formed with passive components, which substrate can be disposed underneath a chip for carrying the chip thereon. However, since conventional passive components such as resistors or capacitors are not suitably applied to this integration type of substrate, forming the integration substrate requires particularly designed passive components, and significantly raises the fabrication costs. Such an expensive substrate is hard to be commercialized and widely used in semiconductor industry.
Furthermore, Taiwan Patent Application No. 89121891 discloses a semiconductor structure illustrated in
FIG. 11
, in which a passive component
40
is directly mounted on and electrically connected to a chip
20
that is accommodated on a substrate
10
. However, this semiconductor structure is rather complexly made, which needs to pre-form a plurality of connection pads
22
on the chip
20
for subsequently attaching the passive component
40
thereto. These connection pads
22
are then subjected to under bumping metalization, so as to electrically connect the connection pads
22
to solder paste that is applied for adhering the passive component
40
onto the connection pads
22
. As a result, fabrication of this semiconductor structure is considerably complicated and cost-ineffective to implement.
Another embodiment of the semiconductor structure disclosed by the foregoing Taiwan patent, as shown in
FIG. 12
, involves the forming of conductive wires
42
,
43
for electrically connecting the passive component
40
that is directly mounted on the chip
20
to a power ring
12
and a ground ring
13
on the substrate
10
. However, contact terminals (not shown) formed on the passive component
40
for wire bonding use are not satisfactorily surface-flat, making a conventional wire bonding machine not able to operate at the contact terminals for forming the conductive wires
42
,
43
. Moreover, if the contact terminals of the passive component
40
are not plated with gold, the wire bonding process cannot be implemented either. Therefore, since this semiconductor structure is hardly fabricated in large scale by using currently available equipment and processes, it is potentially low in demand in the market.
In accordance with the foregoing described, the present invention provides a novel, advanced and practical semiconductor device and a fabrication method thereof, so as to overcome the multiple drawbacks recited above in the prior arts.
SUMMARY OF THE INVENTION
A primary objective of the present invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, in which fine-pitch arrangement of bond fingers on a substrate needs not to be adopted.
Another objective of the invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, in which trace routability of a substrate, and number and positioning of the electronic components are not particularly limited for use in the semiconductor device.
Still another objective of the invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, which can prevent the occurrence of short circuit caused by bonding wires coming into contact with the electronic components.
A further objective of the invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, in which an expensive substrate integrated with electronic components needs not to be used, thereby making fabrication costs significantly reduced.
A further objective of the invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, in which no connection pads for mounting the electronic components thereon need to be formed on a chip, and thus no under bumping metalization for the connection pads is necessarily performed, so that fabrication processes and costs can be simplified and reduced, respectively.
A further objective of the invention is to provide a semiconductor device incorporated with electronic components such as passive components and a fabrication method of the semiconductor device, in which a conventional wire bonding machine is suitably applied for forming bonding wires, and the semiconductor device can be fabricated in a batch manner by using currently available processes and equipment.
In accordance with the above and other objectives, the present invention proposes a semiconductor device and a fabrication method of the same.
The semiconductor device of the invention comprises:
at least one e

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