Semiconductor-on-insulator chip with<100>-oriented...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S033000, C257S351000, C257SE33003, C257SE29003

Reexamination Certificate

active

07319258

ABSTRACT:
A semiconductor-on-insulator device includes a silicon active layer with a <100> crystal direction placed over an insulator layer. The insulator layer is placed onto a substrate with a <110> crystal direction. Transistors oriented on a <100> direction are formed on the silicon active layer.

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A. Shimizu et al., “Local Mechanical-Stress Control (LMC): A New Technique for CMOS-Performance Enhancement”, 2001 International Electron Device Meeting, Washington, D.C., Technical Digest, pp. 433-436.

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