Semiconductor memory with memory cells comprising a vertical...

Details Semiconductor memory with memory cells comprising a vertical... Semiconductor memory with memory cells comprising a vertical...

2005-12-20

2005-12-20

Tran, Mai-Huong (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S301000, C257S302000, C438S243000, C438S244000, C438S386000, C438S387000

Reexamination Certificate

active

06977405

ABSTRACT:
In order to fabricate a semiconductor memory, a trench capacitor is arranged in a first trench. Beside the first trench, a first longitudinal trench and, parallel on the other side of the first trench, a second longitudinal trench are arranged in the substrate. A first spacer word line is arranged in the first longitudinal trench and a second spacer word line is arranged in the second longitudinal trench. There are arranged in the first trench connecting webs between the first spacer word line and the second spacer word line which have a thickness which, in the direction of the first spacer word line, is less than half the width of the first trench in the direction of the first spacer word line.

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