4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Alfred Kersch

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Apparatus for processing a substrate wafer and method for operat

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Configuration for the execution of a plasma based sputter...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and installation for fabricating one-sided buried straps

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method for depositing a layer on a substrate wafer with a sputte

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method for determining the relevant ion and particle flows...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-272044

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