Semiconductor memory device and method of manufacturing for...

Details Semiconductor memory device and method of manufacturing for... Semiconductor memory device and method of manufacturing for...

2007-10-16

2007-10-16

Pham, Hoai (Department: 2814)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S396000, C438S508000

Reexamination Certificate

active

09008525

ABSTRACT:
A semiconductor memory device and method of manufacturing a semiconductor memory device that prevents oxidation of the bit lines caused by misalignment which may occur when patterning a storage electrode. An oxidation preventing layer, such as a nitride layer, is formed over the bit lines or in the contact holes to eliminate the diffusion of oxygen into the bit line structure, thereby preventing oxidation of the bit lines.

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