Static information storage and retrieval – Systems using particular element – Capacitors
Patent
1980-07-24
1982-10-19
Fears, Terrell W.
Static information storage and retrieval
Systems using particular element
Capacitors
365174, G11C 1140, G11C 1124
Patent
active
043553745
ABSTRACT:
A semiconductor memory comprising a memory cell disposed on a p-type semiconductor substrate and including an insulated-gate field effect transistor and a storage capacitor. The storage capacitor comprises: an insulator capacitor including a first electrode disposed on the substrate, a film of Si.sub.3 N.sub.4 disposed on the first electrode, and a second electrode disposed on the Si.sub.3 N.sub.4 film; and a pn junction capacitor including a first n-type impurity region for constituting either the source or drain of the insulated-gate field effect transistor, and a second p-type impurity region disposed in contact with the first impurity region and having a higher impurity concentration than the substrate.
REFERENCES:
patent: 4164751 (1979-08-01), Tasch, Jr.
Hashimoto Norikazu
Koyanagi Mitsumasa
Sakai Yoshio
Sunami Hideo
Fears Terrell W.
Hitachi , Ltd.
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