Semiconductor integrated circuit device with test element...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S765010, C257S508000, C257S758000

Reexamination Certificate

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07068058

ABSTRACT:
Disclosed is a semiconductor integrated circuit device which includes a test element group circuit connected between a first and a second pad. The test element group circuit includes a plurality of semiconductor devices connected in series between the first and second pads. At least two adjacent ones of the semiconductor devices are connected to each other via a signal path that is formed by a multi-layer interconnection structure.

REFERENCES:
patent: 4888631 (1989-12-01), Azuma et al.
patent: 5949090 (1999-09-01), Iwasa et al.
patent: 6177733 (2001-01-01), Obara
patent: 6423558 (2002-07-01), Maeda et al.
patent: 6822330 (2004-11-01), Park et al.

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