Semiconductor integrated circuit device and a method of...

Details Semiconductor integrated circuit device and a method of... Semiconductor integrated circuit device and a method of...

2005-08-15

2009-11-03

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21008

Reexamination Certificate

active

07611942

ABSTRACT:
A semiconductor integrated circuit device having a capacitor element, including a lower electrode provided over an element isolation region of a principal surface of a semiconductor substrate, and an upper electrode provided over the lower electrode with a dielectric film interposed therebetween, has oxidation resistant films disposed between the element isolation region of the principal surface of the semiconductor substrate and the lower electrode, and between the lower electrode and the upper electrode.

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patent: 6410387 (2002-06-01), Cappelletti et al.
patent: 2002/0022314 (2002-02-01), Tuan et al.
patent: 2002/0041526 (2002-04-01), Sugita et al.
patent: 2000-164835 (2000-06-01), None
patent: 2000-269449 (2000-09-01), None

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