Semiconductor fabrication using a collar

Details Semiconductor fabrication using a collar Semiconductor fabrication using a collar

2006-09-19

2006-09-19

Wilczewski, Mary (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S253000

Reexamination Certificate

active

07109089

ABSTRACT:
In one embodiment, a method includes selectively depositing a collar material between a number of memory containers. The collar material along a side of a first memory container of the number of memory containers is in contact with the collar material along a side of a second memory container. An opening exists between the collar material along a corner of the first memory container and the collar material along a corner of a third memory container.

REFERENCES:
patent: 5994153 (1999-11-01), Nagel et al.
patent: 6121083 (2000-09-01), Matsuki
patent: 6180452 (2001-01-01), Figura
patent: 6190989 (2001-02-01), Roberts

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