4. Etching a substrate: processes
  5. Gas phase etching of substrate

Kevin Torek

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Controlled etching of oxides via gas phase reactions

Etching a substrate: processes – Gas phase etching of substrate
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Controlled etching of oxides via gas phase reactions

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuit device with a circuit element formed on...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including high voltage or high power devices isolated from...
Reexamination Certificate

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Method and apparatus for etch of a specific subarea of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
Reexamination Certificate

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Method of forming high aspect ratio structures

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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