Semiconductor devices having tunnel and gate insulating layers

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S316000, C257SE29300

Reexamination Certificate

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07893482

ABSTRACT:
A semiconductor device includes a semiconductor substrate having a surface, buried isolation regions protruding from the surface of the semiconductor substrate, and a first insulating layer on the surface of the semiconductor substrate between the isolation regions and including a fluorine, nitrogen, and/or heavy hydrogen impurity. A floating electrode is on the first insulating layer, a second insulating layer is on the floating electrode and the isolation regions, and a control gate electrode is on the second insulating layer. Related methods of forming semiconductor devices are also disclosed.

REFERENCES:
patent: 6417048 (2002-07-01), Tsemg
patent: 09307081 (1997-11-01), None
patent: 2003188291 (2003-07-01), None
patent: 2005317645 (2005-11-01), None
patent: 10200500000190 (2005-01-01), None
patent: 105005046063 (2005-05-01), None
patent: 10200500073370 (2005-07-01), None
patent: 1020060068848 (2006-06-01), None
Notice of Allowance for Korean Patent Application 10-2006-0091967; Jan. 24, 2008.

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