Semiconductor device having super junction structure and...

Details Semiconductor device having super junction structure and... Semiconductor device having super junction structure and...

2008-03-11

2008-03-11

Tran, Anh Q. (Department: 2819)

Electronic digital logic circuitry

Significant integrated structure, layout, or layout...

C326S102000, C326S103000, C257S328000, C257S341000

Reexamination Certificate

active

07342422

ABSTRACT:
A semiconductor device includes: a cell region; a terminal region; a lower semiconductor layer; a intermediate semiconductor layer on the lower semiconductor layer including a super junction structure; a terminal upper semiconductor layer on the intermediate semiconductor layer; a terminal contact semiconductor region on a surface portion of the terminal upper semiconductor layer adjacent to the cell region; an insulation layer on the terminal upper semiconductor layer having a first part adjacent to the cell region with a small thickness and a second part adjacent to the first part with a large thickness; and a conductive layer in the cell region and a part of the terminal region, the conductive layer extending from the cell region to the part of the terminal region beyond the first part of the insulation layer.

REFERENCES:
patent: 6982459 (2003-01-01), Suzuki et al.
patent: 6639260 (2003-10-01), Suzuki et al.
patent: 6844592 (2005-01-01), Yamaguchi et al.
patent: 7161209 (2007-01-01), Saito et al.
patent: 2005/0098826 (2005-05-01), Yamaguchi et al.

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