Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-01-16
2007-01-16
Whitehead, Jr., Carl (Department: 2813)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S101000, C257S191000, C257S782000
Reexamination Certificate
active
10477109
ABSTRACT:
A semiconductor device has a substrate and a dielectric film formed directly or indirectly on the substrate. The dielectric film contains a metal silicate film, and a silicon concentration in the metal silicate film is lower in a center portion in the film thickness direction than in an upper portion and in a lower portion.
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Ikarashi Nobuyuki
Ono Haruhiko
Watanabe Heiji
Jr. Carl Whitehead
Mitchell James M.
NEC Corporation
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