Semiconductor device having capacitor

Details Semiconductor device having capacitor Semiconductor device having capacitor

2011-07-26

2011-07-26

Thomas, Toniae M (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S311000, C257SE21046, C257SE21649, C257SE27086, C257SE29112, C438S396000

Reexamination Certificate

active

07985999

ABSTRACT:
A semiconductor device having a capacitor and a method of fabricating the same may be provided. A method of fabricating a semiconductor device may include forming an etch stop layer and a mold layer sequentially on a substrate, patterning the mold layer to form a mold electrode hole exposing a portion of the etch stop layer, etching selectively the exposed etch stop layer by an isotropic dry etching process to form a contact electrode hole through the etch stop layer to expose a portion of the substrate, forming a conductive layer on the substrate and removing the conductive layer on the mold layer on the mold layer to form a cylindrical bottom electrode in the mold and contact electrode holes. The isotropic dry etching process may utilize a process gas including main etching gas and selectivity adjusting gas. The selectivity adjusting gas may increase an etch rate of the etch stop layer by more than an etch rate of the mold layer by the isotropic wet etching process.

REFERENCES:
patent: 6458653 (2002-10-01), Jang
patent: 6667209 (2003-12-01), Won et al.
patent: 2002/0019107 (2002-02-01), Lin et al.
patent: 2005/0116318 (2005-06-01), Park
patent: 2005/0245026 (2005-11-01), Kim et al.
patent: 2007/0093055 (2007-04-01), Chou et al.
patent: 10-2002-0057698 (2002-07-01), None
patent: 10-2003-0067821 (2003-08-01), None
patent: 10-2004-0110281 (2004-12-01), None

Affiliated with

Also associated with

Rating

Semiconductor device having capacitor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device having capacitor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device having capacitor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2726117