Semiconductor device having a surface conducting channel and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S022000, C438S049000, C438S136000, C438S137000, C438S138000, C438S146000, C438S290000, C257S134000, C257S646000, C257SE21411

Reexamination Certificate

active

07314801

ABSTRACT:
A semiconductor device including a metal oxide layer, a channel area of the metal oxide layer, a preservation layer formed on the channel area of the metal oxide layer, and at least two channel contacts coupled to the channel area of the metal oxide layer, and a method of forming the same.

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patent: 2003/0218222 (2003-11-01), Wager et al.
patent: 2006/0244107 (2006-11-01), Sugihara et al.
patent: 1544907 (2005-06-01), None
patent: WO2004114391 (2004-12-01), None
patent: WO2005074038 (2005-08-01), None
Oliver Schmidt, Peter Kiesel, Chris G. Van de Walle, Noble M. Johnson, Jeff Nause and Gottfried H. Döhler, “Evidence for an electrically conducting layer at the native zinc oxide surface,”Jpn. J. Appl. Phys.Part 1, vol. 44, 7271-7274 (2005) (published Oct. 11, 2005).
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O. Schmidt, P. Kiesel, C.G. Van De Walle, N.M. Johnson, J. Nause, G.H. Doehler; “Effects of an Electrically Conducting Layer at the Zinc Oxide Surface,” Japanese Journal of Applied Physics, vol. 44, No. 10, Oct. 11, 2005 pp. 7271-7274.
Hong David et al., “Passivation of zinc-tin-oxide tin-film transistors,” Journal of Vacuum Science and Technology. B23(6), Microelectronics and nanometer Structures Processing, Measurement and Phenomena, American Institute of Physics, New York, NY, US, Nov./Dec. 2005, pp. 25-27.
Look, D.C., et al., “Effects of surface conduction on Hall-effect measurements in ZnO,” Superlattices and Microstructures, Academic Press, London, GB, vol. 38, No. 4-6, Oct. 2005, pp. 406-412.
Kwon, Y., et al., “Enhancement-mode thin-film field-effect transistor using phosphorus-doped (Zn,Mg) O channel,” Applied Physics Letters, AIP, American Institute of Physics, Melville, NY, US, vol. 84, No. 14, Apr. 5, 2004 pp. 2685-2687.

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