Semiconductor device having a non-volatile memory and method of

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257316, 36518501, 36518526, H01L 29788

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active

058959505

ABSTRACT:
The invention relates to a non-volatile memory with floating gate, in particular a Flash-EPROM, in which writing takes place through injection of hot electrons into the floating gate and in which erasing takes place through injection of hot holes. To keep the write and erase voltages sufficiently low, p-type zones which locally increase the background doping concentration of the p-type substrate are provided around the n-type source and drain zones. These p-type zones cause an increased field strength at the drain zone whereby hot electrons are formed at the pinch-off point also at lower voltages. This increased background concentration in addition reduces the breakdown voltage of the pn junction of the source and drain zones, so that hot holes for erasing can be formed by pn breakdown at comparatively low voltages. The device is particularly suitable for being integrated into a signal processing IC manufactured in a standard process, such as a microcontroller.

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Hsu et al, "A High Speed, Low Power P-Channel Flash EEPROM using Silicon Rich Oxide as Tunneling, Dielectri", Solid State Devices and Materials, Tsukuba, 1992. pp. 140-142.
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