Semiconductor device fabrication using spacers

Details Semiconductor device fabrication using spacers Semiconductor device fabrication using spacers

2011-08-16

2011-08-16

Lindsay, Jr., Walter L (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S386000, C438S427000, C257SE21549, C257SE21651

Reexamination Certificate

active

07998808

ABSTRACT:
A process for fabrication of a semiconductor device that includes forming a first trench in a semiconductor body, forming spaced spacers in the first trench, and forming a narrower second trench at the bottom of the first trench using the spacers as a mask.

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