Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2008-01-22
2008-01-22
Hoang, Quoc (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S408000, C257SE29278, C438S306000, C438S508000
Reexamination Certificate
active
07321151
ABSTRACT:
An extension region is formed by ion implantation under masking by a gate electrode, and then a substance having a diffusion suppressive function over an impurity contained in a source-and-drain is implanted under masking by the gate electrode and a first sidewall spacer so as to form amorphous layers a semiconductor substrate within a surficial layer thereof and in alignment with the first sidewall spacer, to thereby form an amorphous diffusion suppressive region.
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Kanata Hiroyuki
Ohta Hiroyuki
Saiki Takashi
Fujitsu Limited
Hoang Quoc
Westerman, Hattori, Daniels & Adrian , LLP.
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