Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1997-10-09
2000-04-25
Monin, Jr., Donald L.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438373, 438515, 257411, 257405, H01L 21425
Patent
active
060543574
ABSTRACT:
A semiconductor device having a structure including no LDD region while being structured in such a manner that fixed charges are charged in portions of a gate oxide film overlapping with side walls of a gate electrode formed on the gate oxide film so as to reduce the intensity of electric field between the source and drain of a transistor included in the semiconductor device. The charged-up positive or negative fixed charges serve to invert the conductivity of the channel region portion of a semiconductor substrate on which the gate oxide film is formed, thereby providing the same effect as the LDD region. The invention also provides a method for fabricating the semiconductor device.
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patent: 5672525 (1997-09-01), Pan
patent: 5714788 (1998-02-01), Ngaoaram
patent: 5814863 (1998-09-01), Pan
Hyundai Electronics Industries Co,. Ltd.
Monin, Jr. Donald L.
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