Semiconductor device and manufacturing method therefor

Details Semiconductor device and manufacturing method therefor Semiconductor device and manufacturing method therefor

2006-06-27

2006-06-27

Blum, David S. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

Reexamination Certificate

active

07067380

ABSTRACT:
A semiconductor device manufacturing method includes forming a wiring layer, and forming a first insulating film on the wiring layer under a condition that hydrogen in a plasma is 1% or less in all gas components.

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