Semiconductor device and a method of manufacturing a semiconduct

Details Semiconductor device and a method of manufacturing a semiconduct Semiconductor device and a method of manufacturing a semiconduct

1997-06-03

1998-06-02

Bowers, Jr., Charles L.

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438384, 438396, 438554, H01L 218234

Patent

active

057598878

ABSTRACT:
A method of manufacturing a semiconductor integrated circuit (IC) includes the steps of forming a polycrystalline silicon layer containing impurities on a semiconductor substrate; forming an oxidation-resistant insulating layer on the polycrystalline silicon layer; simultaneously forming resist patterns for forming a capacitor element and a resistor element on the oxidation-resistant insulating layer; and patterning the oxidation-resistant insulating layer and the polycrystalline silicon layer in sequence using resist patterns.

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