Semiconductor device

Details Semiconductor device Semiconductor device

2009-04-21

2010-11-16

Mandala, Victor A (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S127000, C257S170000, C257S409000, C257S484000

Reexamination Certificate

active

07834351

ABSTRACT:
A semiconductor device is disclosed. The device includes a substrate and a first wiring layer overlying the substrate. The first wiring layer comprises a first wiring area surrounded by a first seal ring. The first seal ring comprises a first monitor circuit isolated by a first dielectric layer embedded in the first seal ring. The first monitor circuit is responsive to a predetermined amount of deformation occurs in the third dielectric layer.

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