Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-11-28
2009-12-22
Nguyen, Cuong Q (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S066000, C257S314000, C257S315000, C257SE27103, C257SE29300
Reexamination Certificate
active
07635891
ABSTRACT:
A semiconductor device includes a semiconductor substrate, and a memory cell array provided on the semiconductor substrate and including a plurality of memory cells arranged on the semiconductor substrate, each of the plurality of the memory cells including a first insulating film provided on the semiconductor substrate, a charge storage layer provided on the first insulating film, a second insulating film provided on the charge storage layer, and a control electrode containing metal or metal silicide provided on the charge storage layer via the second insulating film, wherein a corner of a lower part of the control electrode includes semiconductor and fails to contain the metal or the metal silicide in a channel width direction view of the memory cell.
REFERENCES:
patent: 2005/0199956 (2005-09-01), Ding
patent: 2006/0166421 (2006-07-01), Kamioka et al.
patent: 2007/0029603 (2007-02-01), Lee et al.
patent: 2007/0099363 (2007-05-01), Nakajima et al.
patent: 2000-101052 (2000-04-01), None
patent: 2000-200841 (2000-07-01), None
patent: 2005-129942 (2005-05-01), None
patent: 10-2003-0080239 (2003-10-01), None
patent: 10-2006-0033500 (2006-04-01), None
Notification for Filing Opinion mailed Sep. 29, 2008, from the Korean Patent Office in counterpart Korean Application No. 10-2007-122539.
Fujitsuka Ryota
Nakajima Kazuaki
Natori Katsuaki
Nishida Daisuke
Ozawa Yoshio
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Nguyen Cuong Q
Tran Trang Q
LandOfFree
Semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4117483