Selected structurally defined novolak binder resins and their us

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

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430165, 430191, 430192, 430193, G03F 730, G03F 7023

Patent

active

053386523

ABSTRACT:
A novolak resin composition comprising at least one unit of the reaction product of a para-, para-bonded bisphenol having formula (A): ##STR1## wherein R.sub.1 =hydrogen, lower alkyl group having 1-4 carbon atoms, halogen, or lower alkoxy group having 1-4 carbon atoms; wherein

REFERENCES:
patent: 5128230 (1992-07-01), Templeton et al.
Honda et al. "Studies of Dissolution Inhibition Mechanism of DNQ-Novolak Resist [II] Effect of Extended Ortho-Ortho Bond in Novalak", SPIE vol. 1466 Advances in Resist Technology & Processing VIII (1991) pp. 141 et seq.

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