Secondary ion mass spectrometry system and method for focused io

Details Secondary ion mass spectrometry system and method for focused io Secondary ion mass spectrometry system and method for focused io

1986-12-29

1988-11-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250288, 250299, H01J 37252

Patent

active

047851724

ABSTRACT:
A secondary ion mass spectrometry system and method is described which operates several orders of magnitude more quickly than previous systems, and captures information that might previously have been missed. A parallel detection approach is used which simultaneously monitors all secondary ion masses of interest, as opposed to prior serial approaches which sense only one ion mass at a time. The secondary ions are spatially separated according to mass and sensed by a detector array. An ion-electron converter and amplifier, implemented as a microchannel plate assembly, is preferably interfaced between the mass separator and detector. The detector preferably uses an array of wires to collect charge emitted by the microchannel plate. The wires are coupled to output lines by an encoding scheme which allows many fewer output lines to be employed than there are wires.

REFERENCES:
patent: 3784816 (1974-01-01), Abrahamsson
patent: 3986024 (1976-10-01), Radermacher
patent: 4556794 (1985-12-01), Ward et al.
Van Nostrand's Scientific Encyclopedia, Fifth Edition, 1976, pp. 801-802.

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