Secondary-ion mass spectrometry apparatus using field limiting m

Details Secondary-ion mass spectrometry apparatus using field limiting m Secondary-ion mass spectrometry apparatus using field limiting m

1992-04-24

1994-01-11

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250296, H01J 3726

Patent

active

052784070

ABSTRACT:
A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.

REFERENCES:
patent: 3986025 (1976-10-01), Fujiwara et al.
patent: 4510387 (1985-04-01), Izumi et al.
patent: 4639301 (1987-01-01), Doherty et al.
patent: 4939360 (1990-07-01), Sakai
patent: 5086277 (1992-02-01), Toita et al.
patent: 5164596 (1992-11-01), Noguchi et al.

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