Secondary ion mass spectrometry apparatus

Details Secondary ion mass spectrometry apparatus Secondary ion mass spectrometry apparatus

1990-07-18

1991-08-20

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250288, H01J 37256, H01J, H01J

Patent

active

050417258

ABSTRACT:
A secondary ion mass spectrometry apparatus for analyzing an element contained in the sample by radiating a primary ion beam extracted from an ion source to an analytical sample through a focusing system. The secondary ion mass spectrometry apparatus comprises an input unit for inputting data containing analytical elements names and areas, a storage unit for storing operational expressions to be operated on the input data from the input unit and a table to be reference on the input data and the results operated by the operational expressions and from which the necessary data is read, and a control unit for setting focusing conditions of said focusing system using the input data inputted from said input unit and the operational expressions and tables stored in the storage unit.

REFERENCES:
patent: 4510387 (1985-04-01), Izumi et al.
patent: 4874946 (1989-10-01), Kazmerski

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