Secondary ion mass spectrometer for analyzing positive and negat

Details Secondary ion mass spectrometer for analyzing positive and negat Secondary ion mass spectrometer for analyzing positive and negat

1993-03-03

1995-03-28

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

H01J 37244

Patent

active

054019656

ABSTRACT:
A secondary ion mass spectrometer analyzes secondary ions by separating and detecting positive and negative secondary ions generated from a sample when the sample is irradiated with a high speed primary beam. The sample is irradiated with a primary beam such as a high speed atom beam and secondary ions are emitted from the sample. The emitted secondary ions are separated and detected by a quadrupole mass spectrometer. Downstream of the quadrupole mass spectrometer, a plurality of metallic rod electrodes are provided parallel to each other, some of which are supplied with a positive voltage and the rest of which are supplied with a negative voltage. An electrostatic shield surrounds the metallic rod electrodes. The secondary ions are separated into positive and negative secondary ions by the electric fields formed by the metallic rod electrodes. The separated secondary ions are respectively converted into currents by corresponding secondary electron multipliers or Faraday cups.

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International Laboratory, vol. 18, No. 5, Jun. 1988, Fairfield CT US, pp. 26-32, D. Williams, "An Automated Hybrid Mass Spectrometer with a User-Oriented Interface".
Satake et al., "A Simple Ion Energy Analyser Equipped with a Quadrupole Mass Spectrometer", Japanese Journal of Applied Physics, vol. 15, No. 7, Jul. 1976, pp. 1359-1366.
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Schubert et al., "A Simple, Inexpensive SIMS Apparatus", The Review of Scientific Instruments, vol. 44, No. 4, Apr. 1973, pp. 487-491.

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