Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1985-10-18
1988-04-26
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250306, 250397, G01N 2300
Patent
active
047406976
ABSTRACT:
In a secondary ion mass spectrograph, the electrical power supply voltages controlling and pertaining to the polarity of the target secondary ions are all switched between opposite polarities simultaneously while the deflection of the primary ion beam is automatically corrected for any error that may result from the polarity switch-over. This allows quick alternation of the polarity of target ions without loss of accuracy of the primary beam scan. The correction to the primary beam deflected may be predetermined under specific observing conditions or may be derived from theoretical considerations.
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patent: 4132892 (1979-01-01), Wittmaack
patent: 4163153 (1979-07-01), Tamura et al.
patent: 4556794 (1985-12-01), Ward et al.
"Positive Mass Identification on an Ion Microphobe Mass Analyzer by Use of a _Digital Squarer Module," by: W. H. Gries, E. D. Rawsthorne, J. J. Strydom & K. N. Woods, _Pub. in International Journal of Mall Spectrometry and Ion Processes, _59 (1984) 339-342 Elsevier Science Publishers B.V., Amsterdam-Netherlands.
Anderson Bruce C.
Kawasaki Steel Corporation
Miller Austin R.
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