Secondary ion mass spectometry system

Details Secondary ion mass spectometry system Secondary ion mass spectometry system

1993-02-22

1994-12-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

25049221, 250307, H01J 3728, H01J 37317

Patent

active

053767918

ABSTRACT:
A focused ion beam is directed toward a sample to be analyzed while iodine vapor is directed toward the sample. The iodine vapor, which is formed by heating solid iodine to a temperature of 30.degree. C. to 50.degree. C., aids in sputtering of material impinged by the ion beam and in enhancing the conversion of neutral to ionic sputtered species. A quadrupole mass analyzer is positioned for receiving secondary ions sputtered from the sample whereby chemical analysis is accomplished. The iodine may be initially handled in a solid state, exhibiting a low vapor pressure, and is then heated to moderate temperatures inside a focused ion beam system without presenting a toxic hazard or requiring external plumbing.

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