Secondary ion collection and transport system for ion microprobe

Details Secondary ion collection and transport system for ion microprobe Secondary ion collection and transport system for ion microprobe

1985-01-30

1985-12-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250288, 250396R, G01N 2300, H01J 3726

Patent

active

045567948

ABSTRACT:
A secondary ion collection and transport system, for use with an ion microprobe, which is very compact and occupies only a small working distance, thereby enabling the primary ion beam to have a short focal length and high resolution. Ions sputtered from the target surface by the primary beam's impact are collected between two arcuate members having radii of curvature and applied voltages that cause only ions within a specified energy band to be collected. The collected ions are accelerated and focused in a transport section consisting of a plurality of spaced conductive members which are coaxial with and distributed along the desired ion path. Relatively high voltages are applied to alternate transport sections to produce accelerating electric fields sufficient to transport the ions through the section to an ion mass analyzer, while lower voltages are applied to the other transport sections to focus the ions and bring their velocity to a level compatible with the analyzing apparatus.

REFERENCES:
patent: 3798447 (1974-03-01), Lanusse et al.
patent: 3805068 (1974-04-01), Lee
patent: 3845305 (1974-10-01), Liebl
patent: 4126781 (1978-11-01), Siegel
patent: 4132892 (1979-01-01), Wittmaack
patent: 4255661 (1981-03-01), Liebl
"Secondary-Ion Collection System for an Ion Microprobe Analyzer of High Mass Resolution", Krohn et al., Rev. of Sci. Inst., vol. 43, No. 12, Dec. 1972, pp. 1771-1772.

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