Scrubber with sonic nozzle

Details Scrubber with sonic nozzle Scrubber with sonic nozzle

2006-06-20

2006-06-20

Markoff, Alexander (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

C134S001300, C134S034000, C134S902000, C015S077000

Reexamination Certificate

active

07063749

ABSTRACT:
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a substrate supported by the plurality of rollers, and a sonic nozzle positioned at an elevation below the elevation of the scrubber brush and adapted so as to output a sonicated fluid spray that contacts a beveled edge or a major surface of the substrate such that fluid having sufficient sonic energy to harm the scrubber brush will not contact the scrubber brush.

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