Screwless shield assembly for vacuum processing chambers

Details Screwless shield assembly for vacuum processing chambers Screwless shield assembly for vacuum processing chambers

1995-06-05

1997-11-25

Breneman, R. Bruce

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419212, 20429811, 156345, 118715, 118504, 118720, 118721, C23C 1434, C23C 1600, C23F 102

Patent

active

056907958

ABSTRACT:
A structure and method is described for securing an overspray shield in processing chambers in the wall sandwich of the chamber or using a dimensionally compliant floating spacer ring to elastically clamp the overspray shield in position in a vacuum substrate processing chamber without the use of removable fasteners. The configuration uses the differential pressures between the inside and outside of the chamber to clamp the overspray shield along with its shield clamping assembly components at a spacer position in the chamber. The spacer position is generally interior to vacuum sealing limits of the chamber. The arrangement is such that if misalignment occurs a good vacuum-type seal cannot be achieved unless the parts are moved to correct alignment. When correctly aligned the overspray shield is tightly held to the processing chamber wall and electrical continuity between the processing chamber wall and the overspray shield is assured throughout expected process conditions.

REFERENCES:
patent: 5223111 (1993-06-01), Lueft
patent: 5368648 (1994-11-01), Sekizuka
patent: 5419029 (1995-05-01), Raaijmakers
patent: 5518593 (1996-05-01), Hosokawa et al.
patent: 5538603 (1996-07-01), Guo
patent: 5565071 (1996-10-01), Demaray et al.
European Search Report dated Sep. 23, 1996, for European Patent Application Number 96304056.3.

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