Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-08-29
1991-03-12
Howell, Janice A.
Radiant energy
Inspection of solids or liquids by charged particles
250310, 250311, 250423F, 2504911, H01J 3726
Patent
active
049994956
ABSTRACT:
In a tunneling unit of a scanning tunneling microscope (STM), a rough feed mechanism for approaching a sample and a probe to a tunnel area is disposed separately (or is provided to a stage on a sample side, for example), a fine movement element block is formed as a separate unit and the tunnel unit main body is made compact and provided with high rigidity so that it can be mounted to an optical microscope or a laser microscope. If the fine movement element block of the tunnel unit is mounted to a revolver of an optical microscope or the like, rotation positioning accuracy of the revolver is a few microns. Therefore, high precision positioning of the position to be observed by STM can be attained by optical means and measurement having high resolution in an nm order can be conducted by use of STM. Since STM can be mounted to an existing apparatus in accordance with the present invention, measurement accuracy can be improved drastically and the invention is extremely useful industrially.
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Ishijima Hiroshi
Miyata Chikara
Yasutake Masatoshi
Adams Bruce L.
Howell Janice A.
Nguyen Kiet T.
Seiko Instruments Inc.
Wilks Van C.
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