Radiant energy – Inspection of solids or liquids by charged particles
Patent
1995-12-26
1997-04-15
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250287, H01J 3730, H01J 4900, B01D 5944
Patent
active
056212119
ABSTRACT:
A scanning tunneling atom-probe microscope and method for identifying atoms at an identified site on a sample surface involves first identifying the atoms of interest on the sample surface in images formed by a conventional scanning tunneling microscope. These atoms are then transferred to the tip of the scanning tunneling microscope. The sample is then removed, and the atoms ejected from the tip into a conventional time-of-flight spectrometer. By measuring the time of flight of the atoms from the tip to a channel-plate ion detector, the atomic number of the atoms may be determined.
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Anderson Bruce C.
Hein William E.
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