Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-09-20
1999-03-16
Moses, Richard
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, 356399, 356400, 356401, G03B 2742, G01B 1100
Patent
active
058837019
ABSTRACT:
A scanning projection exposure apparatus includes an illumination optical system for illuminating an original with pulse light, a projection optical system for projecting a pattern of the original, illuminated with the pulse light, onto a substrate, a moving device for moving the original and the substrate relative to each other, a position measuring device for measuring a relative positional relation between the original and the substrate, and a controller for discriminating whether the positional relation measured by the position measuring device is in a predetermined range. The discrimination is performed within a period after the moving device initiates the relative movement of the original and the substrate and before the illumination optical system initiates the projection exposure with the pulse light. The controller stops the projection exposure with the pulse light from the illumination optical system when the positional relation is discriminated as being out of a predetermined range.
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Hasegawa Noriyasu
Kurosawa Hiroshi
Ozawa Kunitaka
Yoshimura Keiji
Canon Kabushiki Kaisha
Moses Richard
Virmani Shival
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