Radiant energy – Inspection of solids or liquids by charged particles
Patent
1995-06-05
1996-04-16
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 3726
Patent
active
055085172
ABSTRACT:
A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
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Fujii Toru
Matsushiro Hiroyuki
Ohkubo Hideaki
Onuki Tetsuji
Suzuki Masatoshi
Berman Jack I.
Meller Michael N.
Nguyen Kiet T.
Nikon Corporation
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