Scanning probe type microscope apparatus

Details Scanning probe type microscope apparatus Scanning probe type microscope apparatus

1995-06-05

1996-04-16

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3726

Patent

active

055085172

ABSTRACT:
A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.

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