Scanning probe microscope with scan correction

Details Scanning probe microscope with scan correction Scanning probe microscope with scan correction

1997-04-01

1999-08-17

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

059397195

ABSTRACT:
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

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