4. Radiant energy
  5. Inspection of solids or liquids by charged particles

ThermoMicroscopes Corporation

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Optical microscope stage for scanning probe microscope

Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate

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Optical system for scanning microscope

Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate

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Scanning probe microscope with scan correction

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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