Scanning probe microscope apparatus for use in a scanning electr

Details Scanning probe microscope apparatus for use in a scanning electr Scanning probe microscope apparatus for use in a scanning electr

1995-06-07

1996-04-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 37067

Patent

active

055106153

ABSTRACT:
The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension device are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.

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Hitachi, "S-4100 Hitachi Scanning Tunneling Microscope", pp. 1-22, has no date.
Hitachi, "Hitachi Scanning Tunneling Microscope", pp. 1-10, has no date.

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