Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1992-07-31

1994-05-31

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3726

Patent

active

053171535

ABSTRACT:
A scanning probe microscope, capable of achieving a resolving power of atomic level, is provided with a probe microscope unit 5, 6, 17 for measuring a fine constitution of sample surface with a probe 5, and with an optical microscope unit 8, 10-16 for observing an optical image of sample, in which the probe microscope unit is encased in a box 9 shielded against external noises and electromagnetic waves. The box has a shape of a cone such as triangular cone, which is placed on a triangular surface plate.

REFERENCES:
patent: 4908519 (1990-03-01), Park et al.
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4999495 (1991-03-01), Miyata et al.
Patent Abstracts of Japan, vol. 015, No. 309 (P-1235), Aug. 7, 1991.
R. Guckenberger et al, "Design of a Scanning Tunneling Microscope for Biological Applications", Journal of Vacuum Science and Technology: Part A, vol. 6, No. 2, Mar. 1, 1988, pp. 383-385.
M. Okano et al, "Vibration Isolation for Scanning Tunneling Microscopy", Journal of Vacuum Science and Technology A, vol. 5, No. 6, Nov. 1, 1987, pp. 3313-3320.

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