Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1995-08-10

1997-08-12

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 528

Patent

active

056567693

ABSTRACT:
An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y direction upon application of a voltage. One end of the X-direction piezoelectric driving member is flexibly connected to a frame via a hinge, and the other end of the member is firmly connected to a block. One end of the Y-direction piezoelectric driving member is flexibly connected to the frame via a hinge, and the other end of the member is flexibly connected to the block via a hinge. A probe can be scanned by using this scanning mechanism without causing much fluctuations of the optical axis of a light beam used for the atomic force microscope.

REFERENCES:
patent: 4798989 (1989-01-01), Hiyazaki et al
patent: 4894537 (1990-01-01), Blackford et al.
patent: 5038322 (1991-08-01), Van Loenen
patent: 5155715 (1992-10-01), Ueyama et al.
patent: 5210410 (1993-05-01), Barrett
patent: 5223713 (1993-06-01), Uozumi et al.
patent: 5257024 (1993-10-01), West
patent: 5408094 (1995-04-01), Kajimura
Blackford et al., "High-Stability Bimorph Scanning Tunneling Microscope", Rev. Sci. Instrum., vol. 58, No. 8, Aug. 1987, pp. 1343-1348.

Affiliated with

Also associated with

Rating

Scanning probe microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-161716