4. Measuring and testing
  5. Surface and cutting edge testing
  6. Roughness

Katsushi Nakano

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Charged-particle-beam optical components and systems...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Exposure apparatus and method for producing device

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Exposure apparatus and method for producing device

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Exposure apparatus and method for producing device

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Hollow-beam apertures for charged-particle-beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-310762

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